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Characterization of buried photonic crystal waveguides and microcavities fabricated by deep ultraviolet lithography
| Content Provider | Semantic Scholar |
|---|---|
| Author | Maerki, Iwan Salt, Martin Guy Herzig, Hans Peter Stanley, R. P. Melhaoui, Loubna El Lyan, Ph. Fédéli, J. M. |
| Copyright Year | 2005 |
| Abstract | We present results of the optical characterization of silicon photonic crystal waveguides and microcavities that are completely buried in a silicon dioxide cladding and are fabricated by deep ultraviolet (UV) lithography. The advantages of buried waveguides and deep UV lithography are discussed. Transmission spectra and loss factors for photonic crystal waveguides, as well as quality factors for resonant microcavities, are obtained. The observed characteristics are in good agreement with three-dimensional simulations. |
| Starting Page | 013103 |
| Ending Page | 013103 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1063/1.1948507 |
| Volume Number | 98 |
| Alternate Webpage(s) | http://doc.rero.ch/record/8463/files/M_rki_Iwan_-_Characterization_of_buried_photonic_crystal_waveguides_20071210.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |