NDLI: Tabletop nanometer extreme ultraviolet imaging in an extended reflection mode using coherent Fresnel ptychography

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Tabletop nanometer extreme ultraviolet imaging in an extended reflection mode using coherent Fresnel ptychography

Content Provider	Semantic Scholar
Author	Seaberg, Matthew D. Zhang, Bosheng Gardner, Dennis F. Shanblatt, Elisabeth R. Murnane, Margaret M. Kapteyn, Henry C. Adams, Daniel E.
Copyright Year	2013
Abstract	We demonstrate the first (to our knowledge) general purpose full-field reflection-mode extreme ultraviolet (EUV) microscope based on coherent diffractive imaging. This microscope is capable of nanoscale amplitude and phase imaging of extended surfaces at an arbitrary angle of incidence in a noncontact, nondestructive manner. We use coherent light at 29.5 nm from high-harmonic upconversion to illuminate a surface, directly recording the scatter as the surface is scanned. Ptychographic reconstruction is then combined with tilted plane correction to obtain an image with amplitude and phase information. The image quality and detail from this diffraction-limited tabletop EUV microscope compares favorably with both scanning electron microscope and atomic force microscope images. The result is a general and completely extensible imaging technique that can provide a comprehensive and definitive characterization of how light at any wavelength scatters from a surface, with imminent feasibility of elemental imaging with
Starting Page	39
Ending Page	44
Page Count	6
File Format	PDF HTM / HTML
DOI	10.1364/OPTICA.1.000039
Volume Number	1
Alternate Webpage(s)	http://jila.colorado.edu/kmlabs/sites/default/files/pdf/optica-1-1-39.pdf
Alternate Webpage(s)	https://arxiv.org/pdf/1312.2049v1.pdf
Alternate Webpage(s)	http://jila.colorado.edu/kmgroup/sites/default/files/pdf/optica-1-1-39.pdf
Alternate Webpage(s)	https://jila.colorado.edu/kmgroup/sites/default/files/pdf/optica-1-1-39.pdf
Alternate Webpage(s)	https://doi.org/10.1364/OPTICA.1.000039
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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