The synthesis and characterisation of novel precursors for the chemical vapour deposition of silver

Content Provider	Semantic Scholar
Author	Harker, Robert M.
Copyright Year	1996
Abstract	The work described in this thesis has been concerned with the synthesis and characterisation of novel precursors for the growth of thin silver films via aerosol assisted chemical vapour deposition. Four classes of compounds have been investigated; silver carboxylates and their phosphine adducts, silver fluorocarboxylates and their phosphine adducts, silver p-diketonate phosphine adducts and organometallic silver compounds. Chapter One INTRODUCTION provides a discussion of both the applications of thin silver films and current fabrication techniques. The chapter subsequently introduces chemical vapour deposition (CVD) with particular reference to metal CVD, followed by a survey of reports of silver CVD in the literature. A brief summary of silver(I) chemistry is also included to provide a basis for the structural discussions of later chapters. Chapter Two SILVER CARBOXYLATES details the synthesis and characterisation of a range of silver carboxylates and their phosphine adducts, the strategy being to influence the molecular structure by variation of both the carboxylate and phosphine ligands. Compounds have been characterised by IR, *H, 13C , 31P and 109Ag NMR, thermal analysis techniques (TGA) and mass spectrometry [FAB(LSIMS)]. The structure of [Ag02CMe(PPh3)2] as determined by single crystal XRD is also described. These compounds have been screened for use as precursors for the CVD of silver by aerosol assisted techniques, films grown have been characterised with respect to SEM, EDXS, reflectivity and conductivity.
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Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Thesis