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PHYSICAL AND ENGINEERING FUNDAMENTALS OF MICROELECTRONICS AND OPTOELECTRONICS Development of Methods and Instruments for Optical Ellipsometry at the Institute of Semiconductor Physics of the Siberian Branch of the Russian Academy of Sciences
| Content Provider | Semantic Scholar |
|---|---|
| Author | Spesivtsev, E. V. Rykhlitskiĭ, S. V. Shvets, V. A. |
| Abstract | The current status of ellipsometric methods and hardware tools developed at the Rzhanov Institute of Semiconductor Physics of the Siberian Branch of the Russian Academy of Sciences is considered. A unique static scheme for ellipsometric measurements is presented, which is used as a basis for instruments designed for various purposes: spectral and laser ellipsometers and also ellipsometers for local measurements. The capabilities of ellipsometric instruments are illustrated by results of studying various objects and fast processes. It is demonstrated that complete experiments can be performed with the use of static-type ellipsometers with determination of all parameters of partly depolarized light. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://page-one.springer.com/pdf/preview/10.3103/S8756699011050219 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
