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Quantitative X-Ray Microanalysis with a Low Voltage Scanning Electron Microscope
| Content Provider | Semantic Scholar |
|---|---|
| Author | Horny, Paula Gauvin, Raynald Lifshin, Eric |
| Copyright Year | 2002 |
| Abstract | Nanometer scale objects raise more interest than ever in microelectronics and other applications. To characterize such samples, transmission electron microscope is an ideal tool, but the preparation of the required thin foil is a complex and costly operation. Low voltage scanning electron microscope seems to be a good deal to simplify the analysis of such samples, with simpler sample preparation and larger scale analysis. Low voltage electron beam gives better resolution because of the reduction of the incident electrons interaction volume. However the beam current is also decreased and signals become more sensitive to noise. A Monte Carlo program is being developped in order to compute Xray spectrum with thegoal to find optimal conditionsfor X-ray microanalysis, which areacompromise between resolution and count rates. In thispaper, someresultsand futureimprovementsarepresented. |
| Starting Page | 1474 |
| Ending Page | 1475 |
| Page Count | 2 |
| File Format | PDF HTM / HTML |
| DOI | 10.1017/s1431927602104004 |
| Volume Number | 8 |
| Alternate Webpage(s) | https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S1431927602104004 |
| Alternate Webpage(s) | https://doi.org/10.1017/s1431927602104004 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
