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Study of copper-silicon junctions fabricated by selective electroless deposition
| Content Provider | Semantic Scholar |
|---|---|
| Author | Dhingra, Sunil Arora, Sanjiv George, P. J. |
| Copyright Year | 2004 |
| Abstract | The metal semiconductor contacts have been fabricated by electroless deposition of copper on chemically cleaned p-type silicon and their characteristics studied. A continuous thin film of good quality and adhesion is formed. The values of barrier height and the ideality factor are found to be comparable to those of vacuum evaporated contacts. The barrier heights measured from I-V and C-V characteristics are also found to be comparable. |
| Starting Page | 916 |
| Ending Page | 920 |
| Page Count | 5 |
| File Format | PDF HTM / HTML |
| Volume Number | 42 |
| Alternate Webpage(s) | http://nopr.niscair.res.in/bitstream/123456789/9654/1/IJPAP%2042(12)%20916-920.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |