NDLI: Vibration Rectification in MEMS Accelerometers

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Vibration Rectification in MEMS Accelerometers

Content Provider	Semantic Scholar
Author	Pham, Long H. Desimone, Anthony
Copyright Year	2018
Abstract	High performance MEMS accelerometers offer low cost solutions for a wide range of applications that incorporate inertial measurements. Some examples are navigation and AHRS systems, vibration monitoring for machine health sensing, structural health monitoring of infrastructure, and high precision inclinometers for platform stabilization, tilt monitoring in down-hole directional drilling, leveling in construction industry road graders and surveying equipment, and measuring boom angles in crane stability systems. Most of these examples subject the accelerometer to vibration spanning various amplitudes. Another aspect that varies across these applications is the frequency content of the vibration. A combination of the vibration and sensor and system error sources can lead to vibration rectification, which is an important specification for high performance accelerometers. This article describes how vibration rectification occurs in MEMS accelerometers, and discusses different techniques for measuring this parameter. As a case study, the vibration rectification of the low noise, low power accelerometer ADXL355 is discussed. The low vibration rectification error, along with all these other features, makes it an ideal candidate for the previously highlighted precision applications.
File Format	PDF HTM / HTML
Alternate Webpage(s)	https://www.analog.com/media/en/technical-documentation/tech-articles/vibration-rectification-in-mems-accelerometers.pdf
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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