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Using optimization procedures to calculate parameters of MEMS macromodels
| Content Provider | Semantic Scholar |
|---|---|
| Author | Petrenko, A. I. Ladogubets, Volodymyr Beznosyk, Oleksandr Finogenov, Oleksii |
| Copyright Year | 2009 |
| Abstract | The approaches to get a circuit equivalent of microelectromechanical systems' (MEMS) mechanical components are considered. The usage of the circuit design software optimization procedures to adjust macromodels' parameters obtained as a result of the source equivalent circuit reduction is suggested. An example is considered and the simulation results are given for the problem of finding eigenfrequencies of a beam. The recommendations to choose optimization methods are given. |
| Starting Page | 511 |
| Ending Page | 514 |
| Page Count | 4 |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://cad.kpi.ua/attachments/043_2009_005.pdf |
| Journal | 2009 10th International Conference - The Experience of Designing and Application of CAD Systems in Microelectronics |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |