NDLI: Tungsten-carbon multilayer system studied with x-ray scattering

Content Provider	Semantic Scholar
Author	Kortright, Jeffrey B. Denlinger, Jonathan D.
Copyright Year	1987
Abstract	The tungsten-carbon multilayer system has been studied using x-ray scattering techniques as a function of multilayer period and annealing. Grazing incidence x-ray scattering shows that interatomic arrangements in the W-rich layers depend strongly on their proximity to the interface with the C-rich layers. Amorphous interface layers are stabilized by intermixing of W and C during deposition into local structures similar to those in the tungsten carbides. Further intermixing and structural relaxation in the amorphous state occurs on annealing these structures. This interatomic structural interpretation is consistent with trends in the observed x-ray optical properties. 7 refs., 4 figs.
File Format	PDF HTM / HTML
DOI	10.1557/PROC-103-95
Volume Number	103
Alternate Webpage(s)	https://cloudfront.escholarship.org/dist/prd/content/qt23z8g57x/qt23z8g57x.pdf?t=p0khrw
Alternate Webpage(s)	https://doi.org/10.1557/PROC-103-95
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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