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Modification of carbon films by high-power proton-carbon ion beam of nanosecond duration
| Content Provider | Semantic Scholar |
|---|---|
| Author | Kovivchak, Vladimir S. Panova, Tatyana V. Krivozubov, O. V. Davletkildeev, Nadim A. |
| Copyright Year | 2011 |
| Abstract | The effect of a high-power proton-carbon ion beam on the surface morphology and resistance of carbon films synthesized by plasma-enhanced chemical vapor deposition has been investigated. Possible mechanisms of the surface morphology changes and increase in the carbon film resistance due to irradiation have been discussed. |
| Starting Page | 246 |
| Ending Page | 248 |
| Page Count | 3 |
| File Format | PDF HTM / HTML |
| DOI | 10.1134/S102745101102011X |
| Volume Number | 5 |
| Alternate Webpage(s) | https://page-one.springer.com/pdf/preview/10.1134/S102745101102011X |
| Alternate Webpage(s) | https://doi.org/10.1134/S102745101102011X |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |