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Morphological Aspects of Oxidized Porous Silicon Prepared by Photo Electrochemical Etching
| Content Provider | Semantic Scholar |
|---|---|
| Author | Alwan, Alwan M. Ahmed, Sohail |
| Copyright Year | 2010 |
| Abstract | This paper reports morphological properties of porous silicon and oxidized porous silicon, prepared by photo electrochemical etching from n-type silicon wafers as a function of experimental parameters. Scanning electron microscopic (SEM) Observations of porous silicon layers were obtained before and after rapid thermal oxidation process under different preparation and oxidation conditions .The surface morphology, Pore diameter, wall thickness, pore shape and porosity values were, studied based on microstructure analyses of (SEM) images. |
| Starting Page | 314 |
| Ending Page | 321 |
| Page Count | 8 |
| File Format | PDF HTM / HTML |
| Volume Number | 28 |
| Alternate Webpage(s) | http://uotechnology.edu.iq/tec_magaz/volume282010/No.2.2010/researches/Text%20(10).pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |