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Lthographic Apparatus and Device Manufacturing Method Cross Reference to Related Applications
| Content Provider | Semantic Scholar |
|---|---|
| Author | McPherson, John A. |
| Copyright Year | 2017 |
| Abstract | (54) LITHOGRAPHIC APPARATUS AND DEVICE 5,808,797 A 9, 1998 Bloom et al. MANUFACTURING METHOD 5,982,553 A 11/1999 Bloom et al. 6,133,986 A 10/2000 Johnson (75) Inventor: Henricus Wilhelmus Maria Van Buel, 6,177,980 B1 1/2001 Johnson Eindhoven (NL) 6,448,568 B1 9, 2002 Allen et al. 6,618,118 B2 9, 2003 Minnaert et al. 6,687,041 B1 2/2004 Sandstrom (73) Assignee. ASML Netherlands B.V., Veldhoven 6,747,783 B1 6/2004 Sandstrom (NL) 6,778.257 B2 8/2004 Bleeker et al. c 6,795,169 B2 9/2004 Tanaka et al. (*) Notice: Subject to any disclaimer, the term of this 6,806,897 B2 10/2004 Kataoka et al. patent is extended or adjusted under 35 6,811,953 B2 11/2004 Hatada et al. U.S.C. 154(b) by 308 days. 7,094,506 B2 8/2006 Van Buel 2003/0030781 A1 2/2003 Bleeker et al. This patent is Subject to a terminal dis2003/0086177 A1 5.2003 Kowarz et al. claimer. 2004/0041 104 A1 3/2004 Liebregts et al. 2004/O130561 A1 7/2004 Jain |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/5e/45/49/1a8c5f88733777/US7563562.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
