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Polymer‐Reinforced, Aligned Multiwalled Carbon Nanotube Composites for Microelectromechanical Systems Applications
| Content Provider | Semantic Scholar |
|---|---|
| Author | Fang, Weileun Chu, Huai-Yuan Hsu, Wen-Kuang Cheng, Tung-Wen Tai, Nyan-Hwa |
| Copyright Year | 2005 |
| Abstract | AgNO3 and KNO3 at 400 °C. The thickness of the glass substrate, time of the ion-exchange process, and weight concentration of AgNO3 in the melt determined the concentration and distribution of Ag ions in the glass. Thermal annealing of the ion-exchanged glass in a H2 reduction atmosphere, typically at 400–450 °C, resulted in the formation of spherical silver nanoparticles [14]. Macroporous silicon with lattice constants of 500 nm or 2 lm were grown in a photoelectrochemical etching process of lithographically prestructured <100>-oriented n-type silicon wafers. In each case, the front side of the wafer was in contact with hydrofluoric acid (concentration cHF = 5 wt.-%; T = 10 °C) whereas the backside was illuminated generating electron–hole pairs. An external anodic bias then consumed the electrons, and the electrons/holes diffused through the whole wafer to the silicon electrolyte interface, promoting the silicon dissolution there. The pores with very flat surfaces and high aspect ratios grew straight along the (001) direction of the silicon single crystal [15,16]. The macroporous silicon samples were then sputtered with 10 nm chromium film to avoid anodic bonding during the experiments [17,18]. |
| Starting Page | 2987 |
| Ending Page | 2992 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1002/adma.200501305 |
| Alternate Webpage(s) | http://mse.nthu.edu.tw/~wkhsu/ENGLISH/papers/2005am.pdf |
| Alternate Webpage(s) | https://doi.org/10.1002/adma.200501305 |
| Volume Number | 17 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
