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Investigation of Novel Si/SiGe Hetero Structures and Gate Induced Source Tunneling for Improvement of P-channel Tunnel FETs
| Content Provider | Semantic Scholar |
|---|---|
| Author | Virani, Hasanali G. Rao, Rama Kottantharayil, Anil |
| Copyright Year | 2009 |
| Abstract | Tunnel FET (TFET) with it’s sub 60mV/decade is being explored as an alternative for scaled CMOS, especially for l ow power applications. Whereas a lot of work has been reported on the performance enhancement of the nTFET, relatively few reports have been published on pTFET. Bhuwalka et al. [1] reported the ambipolar working of vertical nTFET with negative gate bias, as a pTFET device. Mayer et al. [2] and Royer et al. [3] has reported SOI, SiGeOI and GeOI pTFET. In all the cases stated above, the ON state current reported f or pTFET are about 5uA/um or less. Toh et al. [4] reported a Ge based double gate pTFET with 3nm HfO 2 gate dielectric (very small EOT = 0.46nm) with an ON state current of 1mA/um. In this paper we have explored the following variations of the simple p-i-n hetro junction pTFET (H-pTFET) architectures shown in Fig. 1 with the aim of improving the pTFET performance: (I) H-pTFET withSi1−γGeγ in the source (II) H-pTFET withSi1−γGeγ source and channel (III) H-pTFET with Si1−γGeγ in the channel (proposed for the first time). It is also shown for the first time that a GIDL like Gate Induced Source Tunneling (GIST) is present in pTFETs and that this effect can be used for further improvements in performance. The 2-D simulations were performed using Synopsis TCAD tool, MEDICI [5]. Kane model for tunneling is used with default parameters which has been reported to reproduce experimental data [6]. |
| File Format | PDF HTM / HTML |
| DOI | 10.7567/SSDM.2009.P-3-4 |
| Alternate Webpage(s) | https://confit.atlas.jp/guide/event-img/ssdm2009/P-3-4/public/pdf_archive?type=in |
| Alternate Webpage(s) | https://doi.org/10.7567/SSDM.2009.P-3-4 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
