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Fabrication of Yb3+: Er3+ co-doped Al2O3 ridge waveguides by the dry etching
| Content Provider | Semantic Scholar |
|---|---|
| Author | Song, Qi Gao, Jinsong Wang, Xiaoyi Chen, Ming Zheng, Xuan-Ming Wang, Ting Li, Chengren Song, Changlie |
| Copyright Year | 2007 |
| Abstract | We present the fabrication process of straight-ridge Yb3+:Er3+ co-doped Al2O3 waveguides. Thin films are synthesized on silica-on-silicon wafers by middle frequency sputtering (MFS) and microwave ECR (MW-ECR) plasma source deposition. Waveguides are developed by reactive plasma etching employing BCl3 gas. Photoluminescence (PL) spectrum and gain measurements at 1.53 µm are investigated at room temperature: a net gain of 5.225 dB/cm is achieved from a 10.5-mm-long waveguide obtained by MFS, and 0.043 dB/cm is achieved from a MW-ECR with a 980-nm pump power of 62 mW. |
| Starting Page | 040509 |
| Ending Page | 040509 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1117/1.2721529 |
| Volume Number | 46 |
| Alternate Webpage(s) | https://www.spiedigitallibrary.org/journalIssue/Download?DOI=10.1117/1.2721529&downloadType=journal+article&fullDOI=10.1117/1.2721529&isResultClick=True |
| Alternate Webpage(s) | https://doi.org/10.1117/1.2721529 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |