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Proposal of Pre-Line Scanning Type and Dual-Directional Type Surface Topography Learning Observer for Amplitude Modulation Dynamic Mode Atomic Force Microscope
Content Provider | Semantic Scholar |
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Author | Shiraishi, Takayuki Fujimoto, H. |
Copyright Year | 2008 |
Abstract | This paper addresses an amplitude modulation dynamic mode atomic force microscope (AMAFM). AFM is a device that can be measure nanoscale surface topography of the sample. It is also known that measurement time is very long. Therefore, high-speed measurement is require in many industry applications. In general AFM, most approach is feedback control. This paper proposes two feedforward compensation methods by surface topography learning observer (STLO) based on surface topography observer. These proposed methods archive high-speed measurement simulation and experimental results as shown. |
File Format | PDF HTM / HTML |
Alternate Webpage(s) | http://fujilab.k.u-tokyo.ac.jp/papers/2008/shiraishiSICE08.pdf |
Language | English |
Access Restriction | Open |
Content Type | Text |
Resource Type | Article |