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Radially Ordered Bit Patterned Media Using a Combination of Nanoimprint Lithography and Self-assembly and Fabrication of Pattern Media Using Ion Implantation with No Need of Planarization
| Content Provider | Semantic Scholar |
|---|---|
| Author | Kundu, Shreya Saifullah, Mohammad S. M. Gaur, Nikita Bhatia, Charanjit Singh |
| Copyright Year | 2011 |
| Abstract | With the patterned media moving towards its next goal of >1 Tbit/inch, the real estate available to achieve such high densities on a hard disk is shrinking smaller in size down to approximately 12 nm x 12 nm. The material requirements to achieve such high densities are undoubtedly challenging. We propose to achieve such high densities using a combination of nanoimprint lithography and selfassembly. The latter provides assembly on a sub-20 nm scale without a long scale order while the former is capable of achieving long range radial order. A combination of both these technique may result in the achievement of long range radial order of the bit patterned media. Direct imprint lithography of SiO2 would be used out to achieve radial patterns on the media and inside these patterns selfassembly of PS-PDMS block copolymer would be carried out. SiO2 from both PDMS and SiO2 resist would be used as a mask to etch the media underneath. This mask would be further used to selectively kill the magnetization of unmasked region by ion-implantation to fabricate the BPM with magnetic and nonmagnetic regions arranged alternatively. When ion implantation is carried out, the unmasked implanted regions would be magnetically damaged using suitable implanted species at optimized dose and energy, whereas the covered regions still remain magnetic. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.idema.org/wp-content/uploads/downloads/2011/12/Radially-Ordered-Bit-Patterned-Media-Using-a-Combination-of-Nanoimprint-Lithography-and-Self-Assembly-and-Fabrication-of-Patterned-Media-Using-Ion-Implantation-with-No-Need-of-Planarization.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
