NDLI: Ultra-sensitive Transition-edge Sensors for Far- Infrared Spectroscopy on SPICA

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Ultra-sensitive Transition-edge Sensors for Far- Infrared Spectroscopy on SPICA

Content Provider	Semantic Scholar
Author	Beyer, Andrew D. Kenyon, Michael Bueno, Juan Echternach, Pierre M.
Copyright Year	2010
Abstract	We report progress in the fabrication of low-thermal conductance (G) transition-edge sensors (TESs) for SPICA. The TESs are silicon-nitride (Si-N) micro-mesh bolometers patterned into grid absorbers suspended by thin support beams. We are prototyping TESs for the Background Limited Far- Infrared Sub-millimeter Spectrograph (BLISS) far-infrared (IR) grating spectrometer, for which the photon-noise-limited noise-equivalent power (NEP) goal is 3×10 -20 W/Hz 1/2 and the NEP requirement is 10 -19 W/Hz 1/2 . The NEP sets the thermal conductivity (G) for a 65 mK operating temperature to be G=4fW/K for the NEP goal and G=45fW/K for the NEP requirement. We report measurements of our progress toward meeting the requirement and goal G values. Additionally, BLISS requires the TESs to be sufficiently fast with an effective response time of !eff " 100ms. For the NEP requirement and G=45fW/K, the heat capacity (C) of the TES absorbers should be on the order of 10fJ/K, which we demonstrate here. In addition to building TESs and TES absorbers and support beams for BLISS, we can also manufacture TES absorbers and support beams suitable for the SpicA FAR-infrared Instrument (SAFARI). We investigate the effect of a dry XeF 2 etch versus a wet KOH etch on the C and G properties of BLISS-like and SAFARI-like absorbers and support beams.
File Format	PDF HTM / HTML
Alternate Webpage(s)	https://www.nrao.edu/meetings/isstt/papers/2010/2010285290.pdf
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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