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128 × 128 long-wavelength/mid-wavelength two-color HgCdTe infrared focal plane array detector with ultralow spectral cross talk.
| Content Provider | Semantic Scholar |
|---|---|
| Author | Hu, Weida Ye, Zhen-Hua Liao, Lei Chen, Hsinchun Chen, Ling-Ling Ding, Rui-Jun He, Li Wangdong-Chen Chen, Xiaoshuang |
| Copyright Year | 2014 |
| Abstract | High temporal and spatial coherent simultaneous long-wavelength/mid-wavelength (LW/MW) two-color focal plane array (FPA) infrared detection is the cutting-edge technique for third-generation infrared remote sensing. In this Letter, HgCdTe LW/MW two-color infrared detectors were designed and fabricated. The top long-wavelength and bottom mid-wavelength infrared planar photodiodes were processed by selective B(+)-implantation after etching the long-wavelength epilayer into a curvature and exposing the mid-wavelength layers for the implantation of the n region of the MW photodiode by a micro-mesa array technique. A 128×128 MW/LW HgCdTe infrared FPA detector is fabricated photo-lithographically by simultaneous nonplanar B(+)-implantation of the LW and MW photodiodes, passivation and metallization of the sidewalls, mesa isolation, and flip-chip hybridization with a read-out integrated circuit. The inner mechanisms for suppressing the cross talk and improving photoresponse have been carried out by combining experimental work with numerical simulations. |
| File Format | PDF HTM / HTML |
| DOI | 10.1364/OL.39.005184 |
| Alternate Webpage(s) | http://www.escience.cn/system/download/77194 |
| PubMed reference number | 25166105 |
| Alternate Webpage(s) | https://doi.org/10.1364/OL.39.005184 |
| Journal | Medline |
| Volume Number | 39 |
| Issue Number | 17 |
| Journal | Optics letters |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
