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A WIP Balance Study from Viewpoint of Tool Group in a Wafer Fab
| Content Provider | Semantic Scholar |
|---|---|
| Author | Rose, Oliver |
| Copyright Year | 2010 |
| Abstract | In a wafer fab, work-in-process (WIP) fluctuation occurs quite often due to tool random failure, setup change, batch processing etc. In this paper, a pull/push concept is proposed in order to balance WIP from viewpoint of tool group. We call it pull and push because on one hand a WIP Control Table is used to measure the pull request of downstream tool group dynamically; On the other hand among the lots which fulfill demand from the downstream tool group with pull request, the upstream tool group tries to schedule an optimal lot considering lot status and local tool group constraint. The simulation results demonstrate that the proposed pull/push concept is superior over First-in-First-out (FIFO) and Minimum Inventory Variability Scheduling (MIVS) with regard to average cycle time as well as cycle time variance under a high fab loading. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.asim-fachtagung-spl.de/asim2010/papers/Proof%20102-2.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |