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Multi stage noise shaping sigma--delta modulator (MASH) for capacitive MEMS accelerometers
| Content Provider | Semantic Scholar |
|---|---|
| Author | Almutairi, Bader Kraft, Michael |
| Copyright Year | 2011 |
| Abstract | Abstract Electromechanical multi stage noise shaping (MASH) sigma–delta modulator (ΣΔM) has the advantages of inherent stability, high dynamic range, and high overload input level compared with the single loop sigma–delta-modulator approach. In this paper, a fourth order electromechanical MASH is studied by Simulink modelling and hardware implementation using surface mount PCB technology. The accelerometer used in the study is fabricated using a Silicon on Insulator (SOI) wafer with a device layer thickness of 50 μm, using a dicing free and dry release process. The experimental results confirm the concept of the MASH structure and show its potential as a closed loop interface concept for a high performance capacitive MEMS accelerometer. The 4th order MASH electromechanical ΣΔM system improves the performance of the 2nd order electromechanical ΣΔM by 20 dB, and shows a noise floor of −110 dB. Furthermore, the system is capable of handling an acceleration input of up to ±1.5 g. However, the MASH-ΣΔM is sensitive to the sensor and system parameters variation; it exhibited performance degradation of 10 dB, due to a leakage of the quantization noise to the input signal. |
| Starting Page | 169 |
| Ending Page | 177 |
| Page Count | 9 |
| File Format | PDF HTM / HTML |
| DOI | 10.1016/j.sna.2012.05.010 |
| Volume Number | 186 |
| Alternate Webpage(s) | https://core.ac.uk/download/pdf/82588289.pdf |
| Alternate Webpage(s) | https://doi.org/10.1016/j.sna.2012.05.010 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
