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PROCESS FOR PURIFYING HALOGEN-CONTAINING GAS BACKGROUND OF THE INVENTION 1. Field of the Invention
| Content Provider | Semantic Scholar |
|---|---|
| Author | Otsuka, Kenji Fukuda, Hiroshi Arakawa, Satoshi |
| Copyright Year | 2017 |
| Abstract | 1,359,047 11/1920 Frary et al. ............................. 423,500 2,785,055 3/1957 Redcay .................................... 423/500 3,375,077 3/1968 Bloch et al. ... ... 42.3/500 3,772,425 11/1973 Kang et al. ..... ..., 423,500 4,131,626 12/1978 Sharma et al... ... 42.3/502 4,201,751 5/1980 Holter et al. ......................... 423/240S 4,744,964 5/1988 Kihl ................ ... 423/240 S 5,019,364 5/1991 Kitahara et al. ... 423/210 5,322,674 6/1994 Mori.................................... 423/240 S |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/63/5e/9e/472a385703d470/US5589148.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |