NDLI: Correlation of surface morphology with chemical structures of sulfur‐passivated GaAs(100) investigated by scanning tunneling microscopy and x‐ray photoelectron spectroscopy

Please wait, while we are loading the content...

Correlation of surface morphology with chemical structures of sulfur‐passivated GaAs(100) investigated by scanning tunneling microscopy and x‐ray photoelectron spectroscopy

Content Provider	Semantic Scholar
Author	Ha, Jeong Sook Park, Seong-Ju Kim, Sung Bock Lee, El Hang
Copyright Year	1995
Abstract	The surface morphology and chemical structures of GaAs(100) after etching with sulfuric acid and sulfur passivation with ammonium sulfide [(NH4)2Sx] solution were investigated using a scanning tunneling microscope and x‐ray photoelectron spectroscopy (XPS). Depending on the chemical treatments which are routinely used in semiconductor processes, the surface morphology was observed to be quite different. The effects of water rinse, HCl treatment, and sulfur treatment time on the surface morphology were studied. Comparison of the surface morphology with chemical structures obtained by XPS was used to explain the evolution of surface morphology during the chemical treatments. In particular, a very flat surface with a surface undulation of ±6 A was obtained by sulfur passivation with (NH4)2Sx solution after chemical etching of a n‐GaAs(100) wafer. These studies enable a better understanding of a correlation of the chemical structures with the surface morphology of the GaAs(100) surface on a nanometer scale.
Starting Page	646
Ending Page	651
Page Count	6
File Format	PDF HTM / HTML
DOI	10.1116/1.579800
Volume Number	13
Alternate Webpage(s)	https://mse.gist.ac.kr/~master/publication/data/JVSTA_2.pdf
Alternate Webpage(s)	https://doi.org/10.1116/1.579800
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in