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Characterization of plasma processes with optical emission spectroscopy
| Content Provider | Semantic Scholar |
|---|---|
| Author | Ș. |
| Copyright Year | 2004 |
| Abstract | Real-time, multichannel, Optical Emission Spectrosco undesirable conditions. was used to record, then analyze, a color change in an ar on plasma. It is shown to be an e PL f 've diagnostic toor, with value as an online monitor, w \ ere it can be used to call process endpoint while simultaneously testing for |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://p2infohouse.org/ref/31/30940.pdf |
| Alternate Webpage(s) | http://infohouse.p2ric.org/ref/31/30940.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |