NDLI: SIMS depth profiling of implanted helium in Al-Mn alloy using CsHe+ molecular ion detection

Content Provider	Semantic Scholar
Author	Tyagi, Ashok Kumar Nair, K. G. M. Krishan, Kanwar
Copyright Year	1993
Abstract	The use of Cs+ primary ions in conjunction with the detection of CsHe+ molecular ions is proposed for the analysis of helium in metals by secondary ion mass spectrometry (SIMS). Concentration depth profiles of helium implanted at 100keV in Al60Mn40 alloy have been measured. Helium concentrations down to about 100 ppm were measured at moderately low sputtering rate of 0·5nm/sec. The experimentally determined implantation profile of helium is compared with the theoretical profile obtained using the Monte Carlo Code TRIM.
Starting Page	45
Ending Page	49
Page Count	5
File Format	PDF HTM / HTML
DOI	10.1007/BF02745306
Alternate Webpage(s)	https://page-one.springer.com/pdf/preview/10.1007/BF02745306
Alternate Webpage(s)	https://doi.org/10.1007/BF02745306
Volume Number	16
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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