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Theoretical and Experimental Investigation of the Plasma Source with Argon Rf Barrier Discharge at Atmospheric Pressure
| Content Provider | Semantic Scholar |
|---|---|
| Author | Bazhenov, Vladimir Yu. Tsiolko, Vyacheslav V. Piun, V. M. Chaplinskiy, R. Yu. Kuzmichev, Anatoly I. |
| Copyright Year | 2014 |
| Abstract | Glow characteristics of capacitive radio frequency discharge with isolated electrodes in atmospheric pressure argon in low-current and high-current modes are determined experimentally and calculated by the hybrid hydrodynamic model. Comparative analysis of obtained experimental data and simulated spatio-temporal distributions of concentrations of discharge plasma electrons and heavy species, mean energy of electrons in the RF barrier discharge enabled interpretation of the discharge structure peculiarities in low-current α, α-γ transition and high-current γ modes. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://vant.kipt.kharkov.ua/ARTICLE/VANT_2014_6/article_2014_6_137.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |