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Modeling of gas discharge plasmas: What can we learn from it?
| Content Provider | Semantic Scholar |
|---|---|
| Author | Bogaerts, Annemie Bleecker, Kathleen De Kolev, Ivan N. Madani, Myriam |
| Copyright Year | 2005 |
| Abstract | Abstract This paper describes some of our modeling efforts for gas discharges, used for plasma surface engineering applications. Depending on the application, we use either a fluid approach or particle-in-cell—Monte Carlo (PIC—MC) models to simulate the plasma behavior. The examples shown in this paper include fluid modeling for nanoparticle formation in silane discharges and for nitrogen dielectric barrier discharges, as well as PIC—MC simulations for a magnetron discharge. |
| Starting Page | 62 |
| Ending Page | 67 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1016/j.surfcoat.2005.02.057 |
| Volume Number | 200 |
| Alternate Webpage(s) | https://www.uantwerpen.be/images/uantwerpen/container2642/files/sct05modeling.pdf |
| Alternate Webpage(s) | https://doi.org/10.1016/j.surfcoat.2005.02.057 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
