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Low-temperature germanium ultra-high vacuum chemical vapor deposition for back-end photonic integration
| Content Provider | Semantic Scholar |
|---|---|
| Author | McComber, Kevin A. Liu, Jifeng Michel, Jurgen Kimerling, Lionel C. |
| Copyright Year | 2009 |
| Starting Page | 137 |
| Ending Page | 139 |
| Page Count | 3 |
| File Format | PDF HTM / HTML |
| DOI | 10.1109/group4.2009.5338312 |
| Alternate Webpage(s) | http://dspace.mit.edu/openaccess-disseminate/1721.1/59994 |
| Alternate Webpage(s) | https://dspace.mit.edu/bitstream/handle/1721.1/59994/McComber-2009-Low-temperature%20germanium%20ultra-high%20vacuum%20chemical%20vapor%20deposition%20for%20back-end%20photonic%20integration.pdf?isAllowed=y&sequence=2 |
| Alternate Webpage(s) | https://doi.org/10.1109/group4.2009.5338312 |
| Journal | 2009 6th IEEE International Conference on Group IV Photonics |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |