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Thermal strain measurement in sol-gel lead zirconate titanate thin films
| Content Provider | Semantic Scholar |
|---|---|
| Author | Berfield, Thomas A. Carroll, James F. Payne, David Alan Sottos, Nancy R. |
| Copyright Year | 2009 |
| Abstract | A fluorescence-based digital image correlation (DIC) technique is used to characterize the in-plane strain development of blanket sol-gel derived lead zirconate titanate thin films deposited on platinized silicon substrates. The in-plane strain is also measured within film line features patterned via a mediated octadecyltrichlorosilane (ODS) monolayer. The results indicate that the selective film failure induced by the mediated ODS layer succeeds in slightly reducing the in-plane strain transverse to the line feature direction (∼25% lower), while remaining nearly the same as the blanket film case in the direction parallel to the line direction. Additional in-plane stress estimates from wafer curvature measurements for the two film configurations (blanket and ODS patterned) were consistent with the DIC measured strain results. |
| Starting Page | 123501 |
| Ending Page | 123501 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1063/1.3251420 |
| Alternate Webpage(s) | http://sottosgroup.beckman.illinois.edu/nrs089.pdf |
| Alternate Webpage(s) | https://doi.org/10.1063/1.3251420 |
| Volume Number | 106 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
