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Polarisation analysing complementary metal-oxide semiconductor image sensor in 65-nm standard CMOS technology
Content Provider | Semantic Scholar |
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Author | Wakama, Norimitsu Okabayashi, D. Noda, Toshihiko Sasagawa, Kiyotaka Tokuda, T. Kakiuchi, Kiyomi Ohta, Jun |
Copyright Year | 2013 |
Abstract | In the present study, the authors demonstrate a complementary metal-oxide semiconductor (CMOS) image sensor implemented with on-chip polarisers using 65-nm standard CMOS technology. The polariser is composed of metal wire grids made of metal wires fabricated by the CMOS process. An extinction ratio of 18.8 dB was obtained for a single pixel with an on-chip polariser, where the line/space widths have the finest pitch obtainable by 65-nm technology. Electrical crosstalk between pixels is reduced by over 25% using a guard ring structure. Polarisation imaging by the sensor was also performed. |
Starting Page | 45 |
Ending Page | 47 |
Page Count | 3 |
File Format | PDF HTM / HTML |
DOI | 10.1049/joe.2013.0033 |
Alternate Webpage(s) | https://digital-library.theiet.org/docserver/fulltext/joe/2013/9/JOE.2013.0033.pdf?accname=guest&checksum=153112DF27288D97C0213E24DFDAB0EF&expires=1561260737&id=id |
Alternate Webpage(s) | https://doi.org/10.1049/joe.2013.0033 |
Volume Number | 2013 |
Language | English |
Access Restriction | Open |
Content Type | Text |
Resource Type | Article |