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Method of Forming Carbon Film, and Method of Manufacturing Magnetc Recording Medium Background of the Invention
| Content Provider | Semantic Scholar |
|---|---|
| Copyright Year | 2017 |
| Abstract | (51) Int. Cl. C23C I4/46 (2006.01) (52) U.S. Cl. .................................................. 204/192.11 (57) ABSTRACT There is provided a method of forming a carbon film which enables formation of a dense carbon film exhibiting high wettability with respect to a lubricant and also having high hardness, the method of forming a carbon film including: introducing a raw material gas (G) containing carbon and hydrogen into a deposition chamber having a reduced pres Sure; ionizing the gas (G) by electric discharge between a filamentous cathode electrode that is heated through energi zation and an anode electrode provided in the periphery of the cathode electrode; and accelerating the ionized gas by a bias voltage that is applied to a substrate (D) to irradiate the surface of the substrate (D) with the accelerated gas, thereby forming a carbon film on the surface of the substrate (D), wherein a pulsed negative Voltage is employed as the bias voltage to be applied to the surface of the substrate (D). |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/20/9f/97/adef8b101be7ee/US20130008776A1.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
