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Intrinsic point defects and grown-in microdefects in silicon crystals—comment on: “Intrinsic point defect behaviour in silicon crystals during growth from the melt: A model derived from experimental results”, T. Abe, T. Takahashi, Journal of Crystal Growth 334 (2011) 16
| Content Provider | Semantic Scholar |
|---|---|
| Author | Voronkov, V. V. Falster, R. |
| Copyright Year | 2012 |
| Abstract | Recently the Journal of Crystal Growth published a paper on grown-in microdefects in silicon crystals [1] by Abe and Takahashi. The research group of Abe is known for having made an outstanding contribution into accumulation of experimental data in this field. But this particular publication – which is concentrated on the mechanism of defect formation in dependence of the growth rate V and the axial temperature gradient G – is so full of confusion that it can be misleading to some readers. The purpose of this note is to clarify the main confusing points of Ref. [1]. Grown-in microdefects in dislocation-free silicon crystals – either Czochralski-grown (CZ) or Float-Zoned (FZ) – are long known to be of two general types: (1) vacancy-type microdefects (normally voids) initially labelled as D-defects, (2) self-interstitial-type microdefects—normally intrinsic dislocation loops initially labelled as A-swirl-defects. There are also smaller swirldefects labelled as B-defects [2]. The microdefect type (V-type or I-type) was shown [3–5] to be controlled by the V/G ratio: V-type microdefects are formed if V/G exceeds a certain critical value (V/G)cr while I-type microdefects are formed when V/G is somewhat below this critical value. This rule was systematically confirmed [4,5]; it is illustrated in Fig. 1. When an observed type of microdefect, for a particular crystal |
| Starting Page | 115 |
| Ending Page | 117 |
| Page Count | 3 |
| File Format | PDF HTM / HTML |
| DOI | 10.1016/j.jcrysgro.2012.04.039 |
| Volume Number | 351 |
| Alternate Webpage(s) | http://pdf.xuebalib.com:1262/4wr6SgKrGdEy.pdf |
| Alternate Webpage(s) | https://doi.org/10.1016/j.jcrysgro.2012.04.039 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
