NDLI: Three-Dimensional Space Charge Distribution Measurement in Electron Beam Irradiated PMMA

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Three-Dimensional Space Charge Distribution Measurement in Electron Beam Irradiated PMMA

Content Provider	Semantic Scholar
Author	Imaizumi, Yoichi Suzuki, Ken Tanaka, Yasuhiro Takada, Tatsuo
Copyright Year	1996
Abstract	The localized space charge distribution in electron beam irradiated PMMA was investigated using pulsed electroacoustic method. Using a conventional space charge measurement system, the distribution only in the depth direction (Z) can be measured assuming the charges distributed uniformly in the horizontal (X-Y) plane. However, it is difficult to measure the distribution of space charge accumulated in small area. Therefore, we have developed the new system to measure the threedimensional space charge distribution using pulsed electroacoustic method. The system has a small electrode with a diameter of 1mm and a motor-drive X-Y stage to move the sample. Using the data measured at many points, the threedimensional distribution were obtained. To estimate the system performance, the electron beam irradiated PMMA was used. The electron beam was irradiated from transmission electron microscope (TEM). The depth of injected electron was controlled using the various metal masks. The measurement results were compared with theoretically calculated values of electron range.
Starting Page	684
Ending Page	689
Page Count	6
File Format	PDF HTM / HTML
DOI	10.1541/ieejfms1990.116.8_684
Volume Number	116
Alternate Webpage(s)	https://www.jstage.jst.go.jp/article/ieejfms1990/116/8/116_8_684/_pdf/-char/ja
Alternate Webpage(s)	https://doi.org/10.1541/ieejfms1990.116.8_684
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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