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Modified Reynolds Equation for Squeeze-Film Air Damping of Slotted Plates in MEMS Devices
| Content Provider | Semantic Scholar |
|---|---|
| Author | Yuan-Cheng, Sun Minhang, Bao Heng, Yang Yi-Ping, Huang |
| Copyright Year | 2006 |
| Abstract | A differential equation for calculating squeeze-film air damping in slotted plates is developed by modifying the Reynolds equation.A term is added to account for the effect of airflow through the slots on the air damping of the plate.The end effect of the airflow in the slots is also treated by substituting an effective channel length for the geometric channel length (i.e.the thickness of the plate).The damping pressure distribution,damping force,and damping force coefficient of the slotted plates can be found by solving the equation under appropriate boundary conditions.With restrictions on the thickness and the lateral dimensions of the slotted plate removed,the equation provides a useful tool for analysing the squeeze-film air damping effect of slotted plates with finite thickness and finite lateral dimensions.For a typical slotted plate structure,the damping force coefficient obtained by this equation agrees well with that generated by ANSYS. |
| Starting Page | 473 |
| Ending Page | 477 |
| Page Count | 5 |
| File Format | PDF HTM / HTML |
| Volume Number | 27 |
| Alternate Webpage(s) | http://www.jos.ac.cn/fileBDTXB/oldPDF/20060317.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
