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Standing-Wave Transform Spectrometer Based on Integrated MEMS Mirror and Thin-Film Photodetector
| Content Provider | Semantic Scholar |
|---|---|
| Author | Kung, Helen L. Bhalotra, Sameer R. Mansell, Justin D. Miller, David A. B. Harris, James S. |
| Copyright Year | 2001 |
| Abstract | In this paper, we report a novel, miniature Fourier transform spectrometer with a linear architecture that works by sampling a standing wave. The spectrometer consists of an electrostatically actuated microelectromechanical mirror with on-resonance displacement of up to 65 m, a thin-film photodetector, and an electrical back plane for actuating the mirror. The integrated device offers mirror stability and fixed relative alignment of the three components. The spectrometer has better than 32-nm resolution at 633 nm. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://clynlish.stanford.edu/publications/j9.pdf |
| Alternate Webpage(s) | https://ee.stanford.edu/~dabm/228.pdf |
| Alternate Webpage(s) | https://web.stanford.edu/group/dabmgroup/publications/c20.pdf |
| Alternate Webpage(s) | http://www.stanford.edu/group/dabmgroup/publications/j9.pdf |
| Alternate Webpage(s) | https://web.stanford.edu/group/dabmgroup/publications/j9.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
