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Superconducting transition-edge-microcalorimeter X-ray spectrometer with 2 eV energy resolution at 1.5 keV☆
| Content Provider | Semantic Scholar |
|---|---|
| Author | Wollman, D. A. Newbury, Dale E. Hilton, Gene Charles Irwin, Kent D. Bergren, Norman F. Deiker, Steven W. Rudman, David Albert Martinis, John M. |
| Copyright Year | 2000 |
| Abstract | Abstract We describe the operation and performance of a prototype microcalorimeter “energy-dispersive” (non-dispersive) X-ray spectrometer (μcal EDS) developed at NIST for use in X-ray microanalysis and X-ray astronomy. The low-energy microcalorimeter detector, consisting of an Al–Ag bilayer superconducting transition-edge sensor (TES) in thermal contact with a Bi X-ray absorber, is designed for operation in the energy range from 0–2 keV and is fabricated using a shadow-mask lithographic process. The TES microcalorimeter is cooled by a compact adiabatic demagnetization refrigerator and is mounted on a scanning electron microscope. This device achieves a best energy resolution of 2.0±0.1 eV at 1.5 keV, as determined from the analysis of digitized X-ray spectra of a complex glass containing many elements. |
| Starting Page | 145 |
| Ending Page | 150 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1016/S0168-9002(99)01351-0 |
| Volume Number | 444 |
| Alternate Webpage(s) | https://ws680.nist.gov/publication/get_pdf.cfm?pub_id=2624 |
| Alternate Webpage(s) | https://doi.org/10.1016/S0168-9002%2899%2901351-0 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |