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Automatic defect inspection of patterned thin film transistor-liquid crystal display (TFT-LCD) panels using one-dimensional Fourier reconstruction and wavelet decomposition
| Content Provider | Semantic Scholar |
|---|---|
| Author | Tsai, D.-M. Hung, C.-Y. |
| Copyright Year | 2005 |
| Abstract | Large-sized flat-panel displays have become increasingly important for use in computer monitors and televisions. This paper has considered the problem of automatic visual inspection of micro-defects including pinholes, scratches and particles in patterned thin film transistor-liquid crystal display (TFT-LCD) panel surfaces. For large-sized TFT-LCD panel inspection, high-resolution line scan is demanded. We propose a global one-dimensional (1-D) Fourier-based image reconstruction scheme that directly works on the 1-D line images instead of the traditional two-dimensional area images. The proposed method fully uses the inherent geometric structure of a TFT-LCD panel. It first eliminates the frequency components that represent the periodic pattern of a TFT-LCD line image in the 1-D Fourier spectrum and then back-transforms the 1-D Fourier-domain image to the 1-D spatial domain image using the inverse Fourier transform. The Fourier reconstruction process can effectively remove the patterned background and distinctly preserve local anomalies in the resulting 1-D image. Wavelet decomposition is further applied to remove uneven illumination in the filtered image so that defects can be easily segmented with simple statistical control limits. Experimental results on a number of micro-defects embedded in TFT-LCD panels show that the proposed method can reliably detect various ill-defined defects without designing and measuring the quantitative features of individual defect types. |
| Starting Page | 4589 |
| Ending Page | 4607 |
| Page Count | 19 |
| File Format | PDF HTM / HTML |
| DOI | 10.1080/00207540500140732 |
| Alternate Webpage(s) | http://pdf.xuebalib.com:1262/51adudDQZ5UA.pdf?down |
| Alternate Webpage(s) | https://doi.org/10.1080/00207540500140732 |
| Volume Number | 43 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
