Quantitative Analysis by Electron Transmission Measurements in a Scanning Electron Microscope

Content Provider	Semantic Scholar
Author	Müller, Erich A. Volkenandt, Tobias Schaadt, Daniel M. Gerthsen, Dagmar
Copyright Year	2010
Abstract	Scanning transmission electron microscopy (STEM) in a conventional scanning electron microscope (SEM) equipped with a high-angle annular dark-field (HAADF) detector is a promising technique for imaging and quantitative analysis of sample thickness and even composition if a reference region with known composition is available. Composition analysis is facilitated by dominant atomic number (Z-)contrast under HAADF conditions [1] which is more pronounced at low electron energies. Low electron energies are also preferable for the investigation of materials sensitive to knock-on damage. Images are easily obtained without the need of an elaborate transmission electron microscope and do not require as much experience as in high-energy electron imaging. Using thin samples a high lateral resolution in the order of 1 nm can be achieved without degradation of the signal-to-noise ratio. Despite these advantages of low kV STEM few examples are found in the literature for quantitative analysis at typical SEM energies [2].
Starting Page	612
Ending Page	613
Page Count	2
File Format	PDF HTM / HTML
DOI	10.1017/s1431927610056151
Alternate Webpage(s)	http://www.daniel-schaadt.de/vortraege/Mueller_MandM2010.pdf
Alternate Webpage(s)	https://doi.org/10.1017/s1431927610056151
Volume Number	16
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article