Loading...
Please wait, while we are loading the content...
Similar Documents
Soil Carbon Sequestration and the Greenhouse Effect
| Content Provider | Semantic Scholar |
|---|---|
| Author | Lal, Rattan Follett, R. F. |
| Copyright Year | 2001 |
| Abstract | A method for etching a TiN layer of a wafer stack in a plasma processing chamber. The method includes the step of etching at least partially through the TiN layer using a first chemistry, which preferably includes a TiN etchant, a noble gas, and a polymer-forming chemical. In one embodiment, the TiN etchant is Cl2, the noble gas is argon, and the polymer-forming chemical is CHF3. |
| File Format | PDF HTM / HTML |
| DOI | 10.5860/choice.39-1554 |
| Alternate Webpage(s) | https://www.agronomy.org/files/publications/2010-2011-society-store-catalog.pdf |
| Alternate Webpage(s) | https://dl.sciencesocieties.org/publications/books/pdfs/sssaspecialpubl/soilcarbonseque/frontmatter |
| Alternate Webpage(s) | https://doi.org/10.5860/choice.39-1554 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |