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Vaporizing liquid microthruster
| Content Provider | Semantic Scholar |
|---|---|
| Author | Mukerjee, Erik V. Wallace, Andrew P. Howard, Dorothy W. Smith, Rosemary L. Collins, Scott D. |
| Copyright Year | 2000 |
| Abstract | MEMS technology is expanding into increasingly diverse applications. As part of a micropropulsion system, microthruster attitude controls have been micromachined in silicon. This paper presents the microthruster design, fabrication, and test results. Fluid injected into a microchamber is vaporized by resistive silicon heaters. The exiting vapor generates the thruster force as it exits a silicon micro-nozzle. The vaporization chamber, inlet and exit nozzles were fabricated using anisotropic wet etching of silicon. With a 5 W heater input, injected water could be vaporized for input flow rates up to a maximum of 0.09 cc/s. Experimental testing produced thruster force magnitudes ranging from 0.15 mN to a maximum force output of 0.46 mN depending on fabrication parameters: chamber length, nozzle geometries, heater power, and liquid flow rates. |
| Starting Page | 231 |
| Ending Page | 236 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1016/S0924-4247(99)00389-1 |
| Alternate Webpage(s) | http://www.las.inpe.br/~jrsenna/AerospaceMEMS/Propulsao/ucd-thruster.pdf |
| Alternate Webpage(s) | https://doi.org/10.1016/S0924-4247%2899%2900389-1 |
| Volume Number | 83 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
