NDLI: Chemically Selective Soft X-ray Direct-Write Patterning of Multilayer Polymer Films

Please wait, while we are loading the content...

Chemically Selective Soft X-ray Direct-Write Patterning of Multilayer Polymer Films

Content Provider	Semantic Scholar
Author	Wang, Jian Hitchcock, Adam P.
Abstract	Chemically selective soft X-ray direct-write patterning of trilayer polymer films was performed in a scanning transmission X-ray microscope, extending recent pioneering work on bilayer polymer films. Two trilayer polymer systems were examined: PMMA/PPC/PAN and PMMA/PEC/PAN, where PMMA ) poly(methyl methacrylate), PPC) poly(propylene carbonate), PAN) polyacrylonitrile, and PEC) poly(ethylene carbonate). Each polymer layer was selectively patterned by exposure at its characteristic absorption energy: 288.45 eV for PMMA, 290.40 eV for PPC (PEC), and 286.80 eV for PAN. The patterns were visualized by imaging at these same energies. For the PMMA/PPC/PAN trilayer, highly selective patterning was achieved for the PAN and PPC layers, while the selectivity for the PMMA layer was poor. This was significantly improved by replacing PPC with PEC. The trilayer patterning process was simulated from the X-ray absorption spectra of the polymers, the layer order and thicknesses, and the critical doses for damage of each polymer. The simulations give semiquantitative predictions of the experimental contrast, and are a useful tool to find exposure times that optimize pattern contrast. Methods to improve patterning selectivity are discussed. Full color pattern reproduction with ∼150 nm spatial resolution is demonstrated with several high-resolution patterns created in the PMMA/PEC/PAN trilayer film.
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://unicorn.mcmaster.ca/aph-pubs/JPCC_111_2007_16330-trilayer-litho.pdf
Language	English
Access Restriction	Open
Subject Keyword	Calcium Carbonate 750 MG Chewable Tablet Carbonates Diagnostic radiologic examination Energy, Physics Image resolution Methacrylates Microscope Device Component Polyhydroxyethyl Methacrylate Polymer Polymethyl Methacrylate Primary peritoneal carcinoma Puromycin Aminonucleoside Selectivity (electronic) Simulation X-Ray (Amazon Kindle) anatomical layer cisplatin/cyclophosphamide/epirubicin protocol polyacrylonitrile
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in