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In-situ growth studies of sputtered YBCO thin films by spectroscopic ellipsometry
| Content Provider | Semantic Scholar |
|---|---|
| Author | Bijlsma, M. E. Blank, Dave H. A. Wormeester, Herbert Silfhout, Arend Van Rogalla, Horst |
| Copyright Year | 1997 |
| Abstract | Using spectroscopic ellipsometry we studied in-situ the growth of off-axis sputtered YBa2Cu3O6+x thin films on (001) SrTiO3 as a function of the deposition parameters. Especially in the very first growth stage ( 106A cm?2 @ 77 K) is smooth and homogeneous, except for the first unit cell layer (initial stage regime). The smoothness of the response is indicative for a step-mode like growth mechanism. In contrast, the initial stage regime is governed by a 2D nucleation mechanism. This behaviour changes when the deposition temperature is lowered. Due to increased disorder, the initial stage regime is extended to larger thicknesses and a true 2D growth mode is no longer apparent. Similar behaviour is observed with increasing oxygen partial pressure, where the optical response is shifted from a step-flow mode like mechanism to an island-growth mode. |
| Starting Page | 15 |
| Ending Page | 18 |
| Page Count | 4 |
| File Format | PDF HTM / HTML |
| DOI | 10.1016/S0925-8388(96)02761-2 |
| Volume Number | 251 |
| Alternate Webpage(s) | http://doc.utwente.nl/24468/1/in-situ_growth.pdf |
| Alternate Webpage(s) | https://doi.org/10.1016/S0925-8388%2896%2902761-2 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
