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STRUCTURAL PROPERTIES OF NITROGEN DOPED ANATASE AND RUTILE TiO2 THIN FILMS
| Content Provider | Semantic Scholar |
|---|---|
| Author | Aijaz, Asim Uddin, Zaheer Siddiqui, Imran Ahmad |
| Copyright Year | 2015 |
| Abstract | Anatase and rutile TiO 2 thin films have been doped by N ion implantation. The effect of N doping on the structural changes of TiO 2 thin films and its correlation to the optical and chemical properties of the films is investigated. The depth and concentration of the implanted N atoms is found not to exhibit substantial difference for anatase and rutile phases. The energy loss of the implanted N atoms correlates well to the energy gained by O and Ti atoms in the TiO 2 lattice. An increased number of O vacancies are found to be generated as compared to Ti for both anatase and rutile phases. The energy loss mechanisms of the implanted N atoms together with the O vacancy generation are found to be the major driving forces for facilitating enhanced optical and chemical properties of the TiO 2 thin films. |
| Starting Page | 2074 |
| Ending Page | 2078 |
| Page Count | 5 |
| File Format | PDF HTM / HTML |
| DOI | 10.24297/jap.v8i2.1514 |
| Volume Number | 8 |
| Alternate Webpage(s) | http://japlive.com/index.php/jap/article/download/1514jap/pdf_152 |
| Alternate Webpage(s) | https://doi.org/10.24297/jap.v8i2.1514 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
