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Measuring of Vibrational Distribution of Piezoelectric Device by Speckle Interferometry with Pulsed Laser
| Content Provider | Semantic Scholar |
|---|---|
| Author | Yamagishi, Naoki Kobayashi, Hajime Mochizuki, Keita Watanabe, Yasuaki |
| Copyright Year | 2013 |
| Abstract | When designing piezoelectric devices, measuring the vibrational mode is very important. To measure the mode, several techniques, e.g., X-ray diffraction and the laser Doppler effect, are used [1]. We have studied the laser speckle interferometry which enables us to measure in-plane and out-of-plane vibration modes quickly without scanning [2]. To improve the measurement sensitivity of the laser spcekle interferometry, a pulsed laser method was suggested [3]. In this research, we analyzed the suggested method, and evaluated the advantages of this method quantitatively. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.use-jp.org/proceedings/USE13/pdf/2P2-20.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
