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Novel Polymeric Surfactants for Improving Chemical Mechanical Polishing Performance of Silicon Oxide
| Content Provider | Semantic Scholar |
|---|---|
| Author | Tseng, Wei-Tsu Kuo, Ping-Lin Liao, Chin-Lung Lu, Rick Xing Ze Lin, Jen-Fin |
| Copyright Year | 2001 |
| Abstract | © The Electrochemical Society, Inc. [2001]. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in [Electrochemical and Solid-State Letters, Vol.4, No.5, pp.G42-G45].” |
| File Format | PDF HTM / HTML |
| DOI | 10.1149/1.1357698 |
| Volume Number | 4 |
| Alternate Webpage(s) | http://ir.lib.ncku.edu.tw/bitstream/987654321/82014/2/3010300701046.pdf |
| Alternate Webpage(s) | https://doi.org/10.1149/1.1357698 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
