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Planar InAs photodiodes fabricated using He ion implantation
| Content Provider | Semantic Scholar |
|---|---|
| Author | Sandall, Ian C. Tan, Chee Hing Smith, Andrew Jonathan Gwilliam, R. M. |
| Copyright Year | 2012 |
| Abstract | This work has shown that it is possible to use He implantation with InAs to produce highly resistive areas and that when combined with post implantation annealing, a sufficiently high resistive region can be formed to allow the fabrication of a planar photodiode. |
| Starting Page | 165 |
| Ending Page | 166 |
| Page Count | 2 |
| File Format | PDF HTM / HTML |
| DOI | 10.1364/OE.20.008575 |
| PubMed reference number | 22513566 |
| Journal | Medline |
| Alternate Webpage(s) | http://eprints.whiterose.ac.uk/76168/1/Implantation%20Paper_Optics%20Express.pdf |
| Alternate Webpage(s) | https://doi.org/10.1364/OE.20.008575 |
| Journal | IEEE Photonics Conference 2012 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |