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Computer-aided design for microelectromechanical systems (MEMS)
| Content Provider | Semantic Scholar |
|---|---|
| Author | Lee, Yung-Cheng McCarthy, Brendan Diao, Jiankuai Zhang, Zhongxia Harsh, Kevin F. |
| Copyright Year | 2003 |
| Abstract | With the advancements of MEMS foundry services and CAD tools, MEMS devices can be cost-effectively designed and prototyped. Here, four designs that utilise these tools are presented:(1) a flexure design used to reduce the device warpage resulting from the mismatch in thermal expansion coefficients between the device and the substrate for flip-chip bonded MEMS, (2) a digitally positioned micromirror using multiple contacts, (3) a large MEMS flap that achieves uniform movement for fluid mixing, and (4) a 3-dimensional, solder-assembled MEMS device that has been optimised for minimal deviation from the desired assembly angle. |
| Starting Page | 356 |
| Ending Page | 356 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1504/IJMPT.2003.002497 |
| Alternate Webpage(s) | http://www.colorado.edu/engineering/MCEN/MEMSII/Papers/yclee_mems_design_2_column.pdf |
| Alternate Webpage(s) | https://www.colorado.edu/engineering/MCEN/MEMSII/Papers/yclee_mems_design_2_column.pdf |
| Alternate Webpage(s) | https://doi.org/10.1504/IJMPT.2003.002497 |
| Volume Number | 18 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
