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High-performance polyimide waveguide array with micro mirror coupler for guided-wave optoelectronic interconnects
| Content Provider | Semantic Scholar |
|---|---|
| Author | Liu, Yongzhi Lin, Lanchao Choi, Chulchae |
| Copyright Year | 2003 |
| Abstract | We report the formation of high-performance polyimide waveguide array with 450 micro mirror coupler fabricated at each end, which provides a high-efficiency output or input surface-normal light couple for the waveguide. This fully embedded integration provides an efficient method of optical interconnection for the board-level data communication and the multi-layer connection. We employed the Si CMOS process compatible polyimide as the fabrication material, which is relatively easy to process and has low propagation loss for light at 850nm wavelength. A 1 x12 waveguide array with 45° micro mirror coupler fabricated at each end is experimentally demonstrated. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://chen-server.mer.utexas.edu/GroupPapers/Liu_PSI000210.pdf |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Acoustic coupler CMOS Coupler Device Component Electrical connection Embedded system Embedding Experiment Interconnection International System of Units Layer (electronics) Normal (geometry) Numerous Software propagation Waveguide Device Component wavelength |
| Content Type | Text |
| Resource Type | Article |
