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MEMS sensors and wireless telemetry for distributed systems
| Content Provider | Semantic Scholar |
|---|---|
| Author | Britton, Charles L. Warmack, R. J. Smith, Scott F. Oden, Patrick Ian Brown, George Mackay Bryan, William L. Clonts, L. G. Duncan, Michael Glen Emery, M. S. Ericson, M. Nance Hu, Zaijun Jones, Richard L. Moore, Michael R. Moore, Jason A. Rochelle, James M. Threatt, T. D. Thundat, Thomas Turner, George W. Wintenberg, A. L. |
| Copyright Year | 1998 |
| Abstract | Selectively coated cantilevers are being developed at ORNL for chemical and biological sensing. The sensitivity can exceed that of other electro-mechanical devices as parts- per-trillion detection can be demonstrated for certain species. We are now proceeding to develop systems that employ electrically readable microcantilevers in a standard MEMS process and standard CMOS processes. One of our primary areas of interest is chemical sensing for environmental applications. Towards this end, we are presently developing electronic readout of a mercury-sensitive coated cantilever. In order to field arrays of distributed sensors, a wireless network for data reporting is needed. For this, we are developing on-chip spread-spectrum encoding and modulation circuitry to improve the robustness and security of sensor data in typical interference- and multipath-impaired environments. We have also provided for a selection of distinct spreading codes to serve groups of sensors in a common environment by the application of code-division multiple-access techniques. Most of the RF circuity we have designed and fabricated in 0.5 micrometers CMOS has been tested and verified operational to above 1 GHz. Our initial intended operation is for use in the 915 MHz Industrial, Scientific, and Medical band. This paper presents measured data on the microcantilever-based mercury detector. We will also present design data and measurements of the RF telemetry chip. |
| File Format | PDF HTM / HTML |
| DOI | 10.1117/12.320161 |
| Volume Number | 3328 |
| Alternate Webpage(s) | http://homer.hsr.ornl.gov/cbps/spie.pdf |
| Alternate Webpage(s) | https://doi.org/10.1117/12.320161 |
| Journal | Smart Structures |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
