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Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks.
| Content Provider | Semantic Scholar |
|---|---|
| Author | Jeon, Seokwoo Park, Jang-Ung Cirelli, Ray Yang, Shu Heitzman, Carla E. Braun, Paul V. Kenis, Paul J. A. Rogers, John A. |
| Copyright Year | 2004 |
| Abstract | High-resolution, conformable phase masks provide a means to fabricate, in an experimentally simple manner, classes of 3D nanostructures that are technologically important but difficult to generate in other ways. In this approach, light passing through a phase mask that has features of relief comparable in dimension to the wavelength generates a 3D distribution of intensity that exposes a photopolymer film throughout its thickness. Developing this polymer yields a structure in the geometry of the intensity distribution, with feature sizes as small as 50 nm. Rigorous coupled-wave analysis reveals the fundamental aspects of the optics associated with this method; a broad-range 3D nanostructures patterned with it demonstrates its technical capabilities. A nanoporous filter element built inside a microfluidic channel represents one example of the many types of functional devices that can be constructed. |
| File Format | PDF HTM / HTML |
| DOI | 10.1073/pnas.0403048101 |
| PubMed reference number | 15314211 |
| Journal | Medline |
| Volume Number | 101 |
| Issue Number | 34 |
| Alternate Webpage(s) | http://www.pnas.org/content/101/34/12428.full.pdf |
| Alternate Webpage(s) | http://braungroup.beckman.illinois.edu/reprints/reprintscopy/pvb035.pdf |
| Alternate Webpage(s) | http://rogers.matse.illinois.edu/files/2004/PNAS2004.pdf |
| Alternate Webpage(s) | https://doi.org/10.1073/pnas.0403048101 |
| Journal | Proceedings of the National Academy of Sciences of the United States of America |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
